Charles Tarrio

Mailstop:	Stop 8410, RADP B102
Office:	Building 245, Room B108
Phone:	301-975-3737
FAX:	301-208-6937
E-MAIL:	charles.tarrio@nist.gov

Education

Ph.D.	Physics, University of Virginia, Charlottesville, VA, 1991.
M.S.	Physics and Math, Bates College, Lewiston, ME, 1982.

Employment

1991-present	Physicist, National Institute of Standards and Technology.
1991	Research Associate, University of Virginia, 1991.
1977-1978	Engineering Assistant, Perceptor Company, Old Saybrook, CT.

Projects

Publications
Solicited reviews, Magazine artiles, Papers in referreed journals, Conference proceedings, etc.

Recent Talks and posters

"At-wavelength metrology for EUV lithography,"
poster presented at First International EUV Lithography Symposium, Dallas Texas, 16 October, 2002.

"EUV Detector performance and non-linearity under high peak-power pulsed conditions,"
poster presented at Sematech EUV Source Workshop, Santa Clara, 23 February, 2003.

"First results from the upgraded NIST/DARPA EUV Reflectometry Facility,"
SPIE conference on Emerging Lithographic Technologies VI, Santa Clara, 6 March 2002.

"Precision reflectometry for EUV lithography,"
NIST Electron and Optical Physics Division seminar, 1 Nov. 2001.

"Absolute EUV metrology,"
Harnessing light: Optical science and metrology at NIST, SPIE annual meeting, San Diego 1 August, 2001 (invited).

"Upgrades to the NIST/DARPA EUV Reflectometry Facility,"
Soft X-ray and EUV imaging systems II, SPIE annual meeting, San Diego, 31 July, 2001 (invited).

"X-Ray microscopy: The last 100 years,"
NIST Electron and Optical Physics Division Seminar, October, 1999

"NIST support of EUV lithography,"
OSA Annual Meeting, Santa Clara, CA, October, 1999.

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