Quantum Processes and Metrology Group

DUV Sources and Materials Characterization

DUV Index of Refraction This project focuses on the determination to high accuracy of the UV index of refraction and its dependences on parameters, such as temperature, wavelength, and stress, of UV materials important for industry and science. These materials include the alkaline-earth fluorides, alkali halides, and UV glasses. Index measurements in the UV are also made on gases. Contact: John H. Burnett (john.burnett@nist.gov) 301-975-2679 To view documents which are "pdf files," a reader is required and noted here by . This software may be downloaded without charge.     Publications: Rajeev Gupta, John H. Burnett, Ulf Griesmann, and Matthew Walhout, "Absolute refractive indices and thermal coefficients of fused silica and calcium fluoride near 193 nm" (894 kB ), Appl. Opt. 37, pp. 5964-5968 (1998). John H. Burnett, Rajeev Gupta, Ulf Griesmann, and Ted E. Jou "Index of refraction and its temperature dependence of calcium fluoride near 157 nm," in Optical Microlithography XII, Luc Van den hove, Editor, Proceedings of SPIE Vol. 3679, 1146-1152 (1999). Ulf Griesmann and John Burnett, "Refractivity of nitrogen gas in the vacuum ultraviolet" (230 kB ) Opt. Lett. 24, 1699-1701 (1999). John H. Burnett, Rajeev Gupta, and Ulf Griesmann, "Absolute index of refraction and its temperature dependence of calcium fluoride, barium fluoride, and strontium fluoride near 157 nm," in Optical Microlithography XIII, Christopher J. Progler, Editor, Proceedings of SPIE Vol. 4000, 1503-1509 (2000). John H. Burnett, Rajeev Gupta, and Ulf Griesmann, "Absolute refractive indices and thermal coefficients of CaF2, SrF2, BaF2, and LiF near 157 nm" (565 kB ), Appl. Opt. 41, 2508-2513 (2002). Data: Indices of Refraction of UV Materials Near 157 nm Index of Nitrogen Gas

Atomic Physics Division