DUV Birefringence
Intrinsic Birefringence
Angular dependence showing 12 directions of birefringence maxima and 14 directions of birefringence zeros. (seven nonbirefringent axes)
One octant - scaled according to Δn
max
= 1, for
q
|| [110]
DUV Birefringence
|
DUV Sources and Materials Characterization