DUV Birefringence

Intrinsic Birefringence

Fig. 1
Figure 1. [100] - [010] Slice - Calculated magnitudes (scaled to 1 at the maximum) of the directional dependence of the intrinsic birefringence and average index shift for propagation in directions in the cube-face plane containing the [001] and [010] directions, represented by the angle measured from the [100] direction.


Fig. 2

Figure 2.Figure [001] - [110] Slice - Calculated magnitudes (scaled to 1 at the maximum) of the directional dependence of the intrinsic birefringence and average index shift for propagation in directions in the cube-diagonal plane containing the [001], [111], and [110] directions, represented by the angle measured from the [001] direction. The birefringence plotted is proportional to the index of refraction for the polarization normal to the [001]-[110] plane, minus the index for the polarization in the plane.

DUV Birefringence   |   DUV Sources and Materials Characterization