Recent Publications by Benjamin Tsai

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Zhang, Z., and Tsai, B.K.,

"Radiometric Temperature: Measurements and Applications," to be published in Experimental Methods in the Physical Sciences, eds. Lucatorto, T., and Parr, A.C., Elsevier Inc., (2007).

Tsai, B.K., and Machin, G.,

"Measurement Fundamentals," to be published as Chapter 3, Radiometric Temperature: Measurements and Applications, eds. Zhang, Z., and Tsai, B.K., Elsevier Inc., (2007)

Tsai, B.K., Gibson, C.E., and Litorja, M.,

"Blackbody Calibration Sources," to be published as Chapter 5, Radiometric Temperature: Measurements and Applications, eds. Zhang, Z., and Tsai, B.K., Elsevier Inc., (2007)

Tsai, B.K.,

"ABIR Calibration," NIST Special Publications 250-68 (2006).

Allen, D.W., Early, E.A., and Tsai, B.K.,

"Regular Spectral Transmittance," NIST Special Publications 250-69 (2006).

Tsai, B.K.,

"Summary of Lightpipe Radiation Thermometry Research at NIST," to be published in the Journal of Research of the National Institute of Standards and Technology, , (2006).

Hanssen, L.M., Tsai, B.K., and Mekhontsev, S.N.,

"Status of NIST Infrared Emittance Measurement System," Proceedings of the 13th IEEE International Conference on Advanced Thermal Processing - RTP 2005, Santa Barbara, CA, pp.207-210 (2005).

Tsai, B.K., Kreider, K.G., and Kimes, W.A.,

"Calibration of Low Temperature Cable-less Lightpipe Pyrometer on the NIST PEB Test Bed," Proceedings of the 13th IEEE International Conference on Advanced Thermal Processing - RTP 2005, Santa Barbara, CA, pp. 193-197 (2005).

Lee, B.J., Zhang, Z.M., Early, E.A., DeWitt, D.P., and Tsai, B.K.,

"Modeling the Radiative Properties of Silicon with Thin-Film Coatings and the Experimental Validation," Journal of Thermophysics and Heat Transfer, 19, no. 4, pp. 558-565 (2005).

Tsai, B.K., Bodycomb, J., DeWitt, D.P., Kreider, K.G., and Kimes, W.A.,

"Emissivity Compensated Pyrometry for Specular Silicon Surfaces on the NIST RTP Test Bed," Proceedings of the 12th IEEE International Conference on Advanced Thermal Processing - RTP 2004, Portland, OR, pp. 167-172 (2004).

Kimes, W.A., Kreider, K.G., Ripple, D.C., and Tsai, B.K.,

"In Situ Calibration of Lightpipe Radiometers for Rapid Thermal Processing between 300 °C to 700 °C," Proceedings of the 12th IEEE International Conference on Advanced Thermal Processing - RTP 2004, Portland, OR, 156-161 (2004).

Kreider, K.G., DeWitt, D.P., Fowler, J.B., Proctor, J.E., Kimes, W.A., Ripple, D.C., and Tsai, B.K.,

"Comparing the Transient Response of a Resistive-Type Sensor with a Thin-Film Thermocouple during the Post-Exposure Bake Process," in Data Analysis and Modeling for Process Control, edited by Kenneth W. Tobin, Jr., Proceedings of SPIE, Vol. 5378, 81-92 (2004).

Tsai, B.K., DeWitt, D.P., Early, E.A., Hanssen, L.M., Kreider, K.G., Lee, B.J., and Zhang, Z.M.,

"Emissivity Standards for Improved Radiation Thermometry During Thermal Processing Of Silicon Materials," Proceedings of the 9th International Symposium on Temperature and Thermal Measurements in Industry and Science, Dubrovnik, Croatia, 2, pp. 1179-1184 (2004).

Tsai, B.K., and Rice, J.P.,

"Comparison of an Oil-Bath Blackbody to a Water-Bath Blackbody using the NIST TXR," Proceedings of the 9th International Symposium on Temperature and Thermal Measurements in Industry and Science, Dubrovnik, Croatia, 2, pp. 859-865 (2004).

Tsai, B.K., Gibson, C.E., Annageri, M.V., Early, E.A., DeWitt, D.P., and Saunders, R.D.,

"Heat-flux Sensor Calibration," NIST Special Publications 250-65 (2004).

Tsai, B.K.,

"Traceable Temperature Calibrations of Radiation Thermometers for Rapid Thermal Processing," to be published in the Proceedings of the 11th IEEE International Conference on Advanced Thermal Processing - RTP 2003 Charleston, SC, 101-106 (2003).

Kreider, K.G., Chen, D.H., DeWitt, D.P., Kimes, W.A., and Tsai, B.K.,

"Lightpipe Proximity Effects on Si Wafer Temperature in Rapid Thermal Processing Tools," Proceedings of the 11th IEEE International Conference on Advanced Thermal Processing - RTP 2003 Charleston, SC, 125-129 (2003).

Kreider, K.G., DeWitt, D.P., Fowler, J.B., Proctor, J.E., Kimes, W.A., Ripple, D.C., and Tsai, B.K.,

"Comparing the Transient Response of a Resistive-Type Sensor with a Thin-Film Thermocouple during the Post-Exposure Bake Process," to be published in the Proceedings of the SPIE, (2003).

Kreider, K.G., Chen, D.H., DeWitt, D.P., Kimes, W.A., and Tsai, B.K.,

"Effects of Lightpipe Proximity on Si Wafer Temperature in Rapid Thermal Processing Tools," to be published in the Proceedings of The 2003 International Conference on Characterization and Metrology for ULSI Technology, Austin, TX, 200-204 (2003).

Chen, D.H., DeWitt, D.P., Tsai, B.K., Kreider, K.G., and Kimes, W.A.,

"Effects of Wafer Emissivity on Rapid Thermal Processing Temperature Measurement," Temperature: Its Measurement and Control In Science and Industry, Chicago, IL, 7, 735-740 (2002).

Murthy, A.V., DeWitt, D.P., Tsai, B.K., Fraser, G.T., and Saunders, R.D.,

"Temperature and Flux Scales For Heat-Flux Sensor Calibration," Temperature: Its Measurement and Control In Science and Industry, Chicago, IL, 7, 687-692 (2002).

Widmann, J.F., Yang, J.C., Bundy, M., Tsai, B.K., and Mulholland, G.W.,

"A Laboratory Apparatus for the Measurement of Optical Extinction Coefficients of Postflame Soot in the Infrared," Review of Scientific Instruments, 74, no. 2, 938-944 (2003).

Kreider, K.G., Kimes, W.A., Meyer, C.W., Ripple, D.C., Tsai, B.K., Chen, D.H., and DeWitt, D.P.,

"Calibration of Radiation Thermometers in Rapid Thermal Processing Tools Using Si Wafers with Thin-film Thermocouples," Temperature: Its Measurement and Control In Science and Industry, Chicago, IL, 7, 1087-1092 (2002).

Tsai, B.K., and DeWitt, D.P.,

"Characterization and Calibration of Lightpipe Radiation Thermometers for use in Rapid Thermal Processing," Temperature: Its Measurement and Control In Science and Industry, Chicago, IL, 7, 441-446 (2002).

Chen, D.H., DeWitt, D.P., Kreider, K.G., Tsai, B.K., and Kimes, W.A.,

"Effects of Wafer Emissivity on Rapid Thermal Processing Temperature Measurement," Proceedings of the 10th IEEE International Conference on Advanced Thermal Processing – RTP 2002, Vancouver, Canada (2002), pp. 59-67.

Tsai, B.K., and DeWitt, D.P.,

"Improving Temperature Accuracy for Rapid Thermal Processing at NIST," Proceedings of the NCSLI 2002 Workshop & Symposium, San Diego, CA (2002), 19 pages.

Kreider, K.G., DeWitt, D.P., Chen, D.H., Kimes, W.A., Meyer, C.W., and Tsai, B.K.,

"Wafer Emissivity Effects on Light Pipe Radiometry in RTP Tools," Proceedings of the 201^st Electrochemical Society Meeting, Philadelphia, PA (2002), 6 pages.

Murthy, A.V., Tsai, B.K., and Saunders, R.D.,

"Calibration of a Heat Flux Sensor up to 200 kW/m² in a Spherical Blackbody Cavity," Thermal Measurements: The Foundation of Fire Standards, ASTM STP 1427, L.A. Gritzo and N.J. Alvares, Eds., ASTM International, West Conshohocken, PA, 51-66 (2002).

Murthy, A.V., Tsai, B.K., and Saunders, R.D.,

"Transfer Calibration Validation Tests on a Heat Flux Sensor in the 51 mm High-temperature Blackbody," Journal of Research of the National Institute of Standards and Technology, 106, 823-831 (2001).

Tsai, B.K., and DeWitt, D.P.,

"Methods used at NIST to Characterize and Calibrate Lightpipe Radiation Thermometers," to be published in Metrologia , (2001).

Zhou, Y.H., Shen, Y.J., Zhang, Z.M., Tsai, B.K., and DeWitt, D.P.,

"A Monte Carlo model for predicting the effective emissivity of the silicon wafer in rapid thermal processing furnaces," International Journal of Mass and Heat Transfer, 45, 1945-1949 (2001).

Shen, Y.J., Zhang, Z.M., Tsai, B.K., and DeWitt, D.P.,

"Bidirectional Reflectance Distribution Function of Rough Silicon Wafers," International Journal of Thermophysics, 22, 1311-1326 (2001).

Zhou, Y.H., Zhang, Z.M., DeWitt, D.P., and Tsai, B.K.,

"Effects of Radiative Properties of Surfaces on Radiometric Temperature Measurement," 9th International Conference on Advanced Thermal Processing of Semiconductors , 179-188 (2001).

K.G. Kreider, D.W. Allen, D.H. Chen, D.P. DeWitt, C.W. Meyer, and B.K. Tsai,

"Effects of Wafer Emissivity on Lightpipe Radiometry in RTP Tools," 9th International Conference on Advanced Thermal Processing of Semiconductors , 163-168 (2001).

Murthy, A.V., Tsai, B.K., and Saunders, R.D.,

"Transfer Calibration Validation Tests on a Heat Flux Sensor in the 51-mm High-temperature Blackbody," Journal of Research of the National Institute of Standards and Technology, 106, 823-831 (2001).

Gibson, C.E., Yoon, H.W., Tsai, B.K., Johnson, B.C., and Saunders, R.D.,

"Non-contact Thermometry in the Optical Technology Division at NIST," Thermosense XXIII , Rozlosnik, A.E., and Dinwiddie, R.B., eds., Proceedings of SPIE Vol. 4360, pp. 333-341 (2001).

Tsai, B.K., Widmann, J.F., Bundy, M., and Hill, S.M.,

"Characterization of an Infrared Spectrograph for Non-Contact Thermometry Applications Using a Sodium Heat Pipe Blackbody," Thermosense XXIII , Rozlosnik, A.E., and Dinwiddie, R.B., eds., Proceedings of SPIE Vol. 4360, pp. 438-446 (2001).

Tsai, B.K., Meyer, C.W., and Lovas, F.J.,

"Characterization of Lightpipe Radiation Thermometers for the NIST Test Bed," 8th International Conference on Advanced Thermal Processing of Semiconductors , Gaithersburg, MD, 83-93 (2000).

Zhou, Y.H., Shen, Y.J., Zhang, Z.M., Tsai, B.K., and DeWitt, D.P.,

"Impact of Directional Properties on the Radiometric Temperature Measurement in Rapid Thermal Processing," 8th International Conference on Advanced Thermal Processing of Semiconductors , Gaithersburg, MD, 94-103 (2000).

Zhou, Y.H., Shen, Y.J., Zhang, Z.M., Tsai, B.K., and DeWitt, D.P.,

"Monte Carlo Simulation for Radiometric Temperature Measurement in Rapid Thermal Processing," Proceedings of the ASME Heat Transfer Division - 2000 , Edited by J.H. Kim et al., HTD-Vol. 366-5, pp.187-190, (2000).

Shen, Y.J., Zhang, Z.M., Tsai, B.K., and DeWitt, D.P.,

"Bidirectional Reflectance Distribution Function of Rough Silicon Wafers," Proceedings of the Fourteenth Symposium on Thermophysical Properties , (2000).

Meyer, C.W., DeWitt, D.P., Kreider, K.G., Lovas, F.J., and Tsai, B.K.,

"ITS-90 Calibration of Radiation Thermometers for RTP Using Wire/thin-film Thermocouples on a Wafer," 2000 International Conference on Characterization and Metrology for ULSI Technology , (2000).

Tsai, B.K.,

"ITS-90 Calibration Of Radiometers Using Wire/Thin-Film Thermocouples in The NIST RTP Tool: Effective Emissivity Modeling," NIST Non-Contact Thermometry Internal Workshop , (2000).

Murthy, A.V., Tsai, B.K., and Saunders, R.D.,

"Radiative Calibration of Heat flux Sensors at NIST - Facilities and Techniques," Journal of Research of the National Institute of Standards and Technology , 105, 293-305 (2000).

Rosa, F., Zhou, Y.H, Zhang, Z.M., DeWitt, D.P., and Tsai, B.K.,

"Modeling Chamber Radiation Effects On Radiometric Temperature Measurement In Rapid Thermal Processing," to be published in The Journal of the Electrochemical Society, (1999).

Tsai, B.K., DeWitt, Lovas, F.J., Kreider, K.G., Meyer, C.W., and Allen, D.W.,

"Chamber Radiation Effects on Calibration of Radiation Thermometers with a Thin-Film Thermocouple Test Wafer Measurement In Rapid Thermal Processing," to be published in Metrologia Delft, The Netherlands (1999).

Tsai, B.K., and DeWitt, D.P.,

"ITS-90 Calibration of Radiometers Using Wire/Thin-Film Thermocouples in the NIST RTP Tool: Effective Emissivity Modeling," 7th International Conference on Advanced Thermal Processing of Semiconductors, Colorado Springs, CO, 125-135 (1999).

Meyer, C.W., Allen, D.W., DeWitt, D.P., Kreider, K.G., Lovas, F.L., and Tsai, B.K.,

"ITS-90 Calibration of Radiometers Using Wire/Thin-Film Thermocouples in the NIST RTP Tool: Experimental Procedures and Results," 7th International Conference on Advanced Thermal Processing of Semiconductors, Colorado Springs, CO, 136-141 (1999).

Murthy, A.V., Tsai, B.K., and Saunders, R.D.,

"Comparative calibration of heat flux sensors in two blackbody facilities," Journal of Research of the National Institute of Standards and Technology, 104, no. 5, 487-494 (1999).

Murthy, A.V., Tsai, B.K., and Saunders, R.D.,

"High Heat Flux Sensors Calibration in a Cooled Enclosure," Proceedings of the 45th International Instrumentation Symposium, Albuquerque, NM, 91-100 (1999).

Murthy, A.V., Tsai, B.K., and Saunders, R.D.,

"Aperture Proximity Effects in High Heat Flux Sensors Calibration," Journal of Research of the National Institute of Standards and Technology, 103, 621-624 (1998).

Murthy, A.V., Tsai, B.K., and Saunders, R.D.,

"High-Heat-Flux Sensor Calibration using Black-body Radiation," Metrologia, 35, 501-504 (1998).

Tsai, B.K. and Johnson, B.C.,

"Evaluation of Uncertainties in Fundamental Radiometric Measurements," Metrologia, 35, 587-593 (1998).

Lovas, F.J., Tsai, B.K., and Gibson, C.E.,

"Meeting RTP Temperature Accuracy Requirements: Measurement and Calibrations at NIST," Materials Research Society Symposium Proceedings, eds. Öztürk, M.C., Roozeboom, F., Timans, P.J., and Pas, S.H., 525, 127 (1998).

Kreider, K.G., DeWitt, D.P., Tsai, B.K., Lovas, F.J., and Allen, D.W.,

"RTP Calibration Wafer Using Thin-Film Thermocouples," Materials Research Society Symposium Proceedings, eds. Öztürk, M.C., Roozeboom, F., Timans, P.J., and Pas, S.H., 525, 87 (1998).

Kreider, K.G., DeWitt, D.P., Tsai, B.K., Lovas, F.J., and Allen, D.W.,

"Calibration Wafer for Temperature Measurements in RTP Tools," Characterization and Metrology for ULSI Technology: 1998 International Conference, CP449, 303-309 (1998).

Tsai, B.K.,

"Developments in the New Spectral Irradiance Scale at NIST," (110 k pdf) Journal of Research of the National Institute of Standards and Technology 102(5), 551-558 (1998).

Tsai, B.K.,

"Optical Technology Division Homepages on the World Wide Web," /Divisions/Div844/div844.html (1997).

Gibson, C.E., Tsai, B.K., and Parr, A.C.,

"Radiance Temperature Calibrations," NIST Special Publications 250-43 (1997).

Murthy, A.V. and Tsai, B.K.,

"Radiative Calibration of Heat Flux Sensors at NIST - an Overview," Proceedings of the ASME Heat Transfer Division, Volume 3 HTD-Vol. 353, 159-164 (1997).

Murthy, A.V. and Tsai, B.K.,

"Transfer Calibration of Heat Flux Sensors at NIST," ASME Proceedings of the 32nd National Heat Transfer Conference HTD-345, 81-88 (1997).

Murthy, A.V., Tsai, B.K., and Gibson, C.E.,

"Calibration of High Heat Flux Sensors at NIST," (443 k pdf) Journal of Research of the National Institute of Standards and Technology 102(4), 479-488 (1997).

Tsai, B.K., Lovas, F.J., DeWitt, D.P., Kreider, K.G., Burns, G.W., and Allen, D.W.,

"In-chamber Thermometry Calibration using a Silicon Proof-wafer," RTP '97 Conference 1, 340-346 (1997).

Tsai, B.K., Shoemaker, R.L., DeWitt, D.P., Cowans, B.A., Dardas, Z., Delgass, W.N., and Dail, G.J.,

"Dual-Wavelength Radiation Thermometry: Emissivity Compensation Algorithms," Selected Papers on Optical Techniques for Industrial Inspection, SPIE Milestone Series MS 135, 467-479 (1997).

Tsai, B.K.,

"Developments in the New Spectral Irradiance Scale at NIST," NCSL 1996 Workshop & Symposium 1, 325-341 (1996).

Tsai, B.K., Johnson, B.C., and Saunders, R.D.,

"Evaluation of the Radiation Characteristics of a High-Temperature Blackbody," SPIE Proceedings 2553, 514-523 (1995).

Tsai, B.K., Johnson, B.C., Saunders, R.D., and Cromer, C.L.,

"Comparison of filter radiometer spectral responsivity with the NIST spectral irradiance and illuminance scales," Metrologia 32(6), 473-477 (1995).

Tsai, B.K., and DeWitt, D.P.,

"Subsurface Scattering Effects in Semitransparent Materials: Application to Thermal Measurements," TEMPMEKO '93, 18 pages (1995).

Mack, C.A., DeWitt, D.P., Tsai, B.K., and Yetter, G.,

"Modeling of Solvent Evaporation Effects for Hot Plate Baking of Photoresist," SPIE Proceedings 2195, 584-595 (1994).

Tsai, B.K., DeWitt, D.P., and Shaffer, G.H.,

"Macroscopic Spread Function Analysis for Sub-surface Scattering of Semitransparent Materials," AIAA 28th Thermophysics Conference 93-2803, 9 pages (1993).

Tsai, B.K., DeWitt, D.P., and Dail, G.J.,

"Application of dual-wavelength radiation thermometry to the aluminum industry," Measurement 11, 211-221 (1993).

Pellerin, M.A., Tsai, B.K., DeWitt, D.P., and Dail, G.J.,

"Emissivity compensation methods for aluminum alloy temperature determination," Temperature 2, 871-876 (1992).

Tsai, B.K., DeWitt, D.P., and Shaffer, G.H.,

"Macroscopic Spread Function Analysis for Sub-surface Scattering of Semitransparent Materials," AIAA 26th Thermophysics Conference 91-1399, 8 pages (1991).

Tsai, B.K., DeWitt, D.P., and Dail, G.J.,

"Dual-Wavelength Radiation Thermometry for Aluminum Alloys," (1990).

Tsai, B.K., Shoemaker, R.L., DeWitt, D.P., Cowans, B.A., Dardas, Z., Delgass, W.N., and Dail, G.J.,

"Dual-Wavelength Radiation Thermometry: Emissivity Compensation Algorithms," International Journal of Thermophysics 11(1), 269-281 (1990).