HCl Lithography with 100 nm Edge Resolution

10 µm squares on SAM written with Xe44+
L. P. Ratliff, et al., Appl. Phys. Lett. 75, 590 (1999).

1 µm squares on PMMA written with Xe44+
J. D. Gillaspy, et al., J. Vac. Sci. Tech. B 16, 3294 (1998).