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DISCLAIMER: Certain commercial equipment, instruments, materials and suppliers are identified in this document to foster understanding. Such identification does not imply a recommendation or endorsement by the National Institute of Standards and Technology, nor does it imply that the equipment, instruments, materials, or suppliers are necessarily the best available for the purpose. These drawings are provided free of charge. NIST is not responsible for their generation nor accuracy.

Items noted by # refer to parts found within listed manufactures catalogs.

Last revised: April 27, 1994

(Assembly Drawing AY-R12736 REV E)

A.	Plasma Reactor Chamber per R15967 REV D	1 ea.
B.	Pumpout Weldment per R16139 REV B	1 ea.
C.	Non-Movable Upper Electrode Assembly	1 ea.
	R15966 REV A Reactor Top Flange	1 ea.
	R15393 REV B Showerhead	1 ea.
	R15965-101 REV A Indium Gasket	1 ea.
	R15965-102 REV A Indium Gasket	1 ea.
	R15965-104 REV A Indium Gasket	1 ea.
	R15491-101 REV C Guard Ring	1 ea.
	R15448-101 REV C Bearing Ring	1 ea.
	R17442-101 REV F Upper Electrode Weldment	1 ea.
	15447-102 REV E Alumina Insulator required (If Alumina not available - Teflon has been substituted for this item)
D.	Movable Upper Electrode Assembly	1 ea.
	910919-3 REV B Top Flange/Bellows/Conveyor Ring Assembly	1 ea.
	R15448-102 REV C Bearing Ring	1 ea.
	R16135 REV B Retaining Ring	1 ea.
	R16137 REV B Swivel Housing	1 ea.
	R16187 REV B Guide Rod	2 ea.
	R17442-102 REV F Electrode Weldment	1 ea.
	R17483 REV B Guide Pin	2 ea.
	R17484 REV B Angle Bracket	2 ea.
	Item #91 Steel Handle (CL-1-RH, Carr Lane Mfg.)	2 ea.
	R15491-102 REV C Guard Ring	1 ea.
	**R15393 REV B Showerhead	1 ea.
	Item #83 Quick Release Pin (92385A036, McMaster Carr Mfg.)	2 ea.
	**R15965-101 Indium Gasket REV A	1 ea.
	**R15965-102 Indium Gasket REV A	1 ea.
	**R15965-104 Indium Gasket REV A	1 ea.
	B-675-12, 12 point bolt sets	1 ea.
	R15447-104 REV E Alumina Insulator required (If Alumina not available - Teflon has been substituted for this item)
E.	Lower Electrode Assembly	1 ea.
	R15492-101 REV A Electrode	1 ea.
	R15491-101 REV C Guard Ring	1 ea.
	R15448-101 REV C Bearing Ring	1 ea.
	R15965-103 REV A Indium Gasket	1 ea.
	R17443 REV F Lower Electrode Weldment	1 ea.
	R15547-101 REV E Alumina Insulator (If Alumina not available - Teflon has been substituted for this item)	1 ea.
	R15547-103 REV E Alumina Insulator (If Alumina not available - Teflon has been substituted for this item - for RGA port only)	1 ea.
	9551-00632-4 #6-32 x 3.0 Long SHC Screws (for GRA electrode Only)	6 ea.
F.	Base Weldment per R16071 REV D	1 ea.
G.	Lower Pumping Manifold Assembly per 940413-6	1 ea
	911004-2-02 REV C Manifold Sub Assembly	2 ea.
	911004-2-03 REV A Manifold Sub Assembly (tee)	1 ea.
	931213-1 REV B Manifold Sub Assembly (full nipple)	2 ea.
	931213-2 REV A Manifold Sub Assembly	2 ea.
H.	Viewports (Glass. Quartz is also available.)
	ZV-600 - 6"	2 (max)
	ZV-400 - 4"	2 (max)
	ZV-150 - 2 3/4"	4 (max)
I.	Misc. Assembly Hardware	1 ea.
	R25238 REV A Pan Head Screws	24 ea.
	R16138 REV A Modified Pan Head Screws	18 ea.
	9551-01032-W Item #80 #10 Flat Washer	21 ea.
	9551-00632-WS Item #84 #6 Flat Washers	36 ea.
	9551-00632-13 Item #82 #6-32 x .625 Long SHC Screws	21 ea.
	2-151 O-Ring, Viton	3 ea.
	2-254 O-Ring, Viton	3 ea.
	B-275T-12, 12 point bolt sets	3 pkg.
	B-275-12, 12 point bolt sets	1 pkg.
	B-600T-12, 12 point bolt sets	1 pkg.
	B-600-12 bolt sets	1 pkg.
	B-800T-12	2 pkg.
	B-675T bolt sets	1 pkg.
	B-1325T bolt sets	2 pkg.
	G-1325 individual copper gaskets	2 ea.
	G-600 copper gaskets	1 pkg.
	G-275 copper gaskets	3 pkg.
J.	Optional Pumpout Configuration
	R20501 REV B ???Reducer Cross (Replaces R17345???)	1 ea.
	Item #87, 3T-150 Tee	1 ea.
	Item #116, 275-1/4SWAG	1 ea.
	2FC-150-2 Flex Coupling	1 ea.
	Item #110, GVP-1502-CF Pneumatic 1.5 inch ID Gate Valve	2 ea.
	Item #112, GVP-4002-CF Pneumatic 1.0 inch ID Gate Valve	1 ea.
	Item #88, Exhaust Throttle Valve required (Mfg. by MKS Instruments)
K.	Inductive Coil Assembly per 940201-1-8 REV A	1 ea.
	940201-20 Coil Tube/Top Plate Assembly	1 ea.
	940201-2 Skirt Port Ring	1 ea.
	940201-4 Spacer Ring	1 ea.
	940201-5 Electrode Skirt	1 ea.
	940201-6 Modified 13.25" Flange	1 ea.
	940201-7 REV A Coil	1 ea.
	940201-8 Quartz Window	1 ea.
	2-247 O-rings for window	2 ea.
	2-263 O-rings for spacer	2 ea.
	9551-00440-4 #4-40 x .75" SHC screws	6 ea.
	931214-1 REV A Teflon insulator	1 ea.
	9551-01025-9 1/4-20 x 1.25 Hex Head Screws	6 ea.
	9551-00025-W 1/4" Washers	6 ea.
L.	Electropolish on all stainless steel sub-assemblies	1 ea.