NIST Physics Laboratory
"Technical Activities 2000"
Electron and Optical Physics Division
Division cover page | Mission / Organization |
Current Directions | Technical Highlights | Future Directions
Current Directions
The mission of the Electron and Optical Physics Division is to "apply its
core physics competence to solve the measurement problems encountered by
electronic, magnetic, and optical technologies at the atomic level." By
developing innovative instrumentation and techniques, it maintains world-class
capabilities for: determining magnetic microstructure; establishing the
physical and chemical basis of device fabrication on the atomic scale;
producing and characterizing artifacts with atomic-scale quality control;
developing physical and applied optics in the 10 nm to 100 nm
wavelength range; maintaining the National radiometric standard in the
2 nm to 250 nm wavelength range; and delivering quality measurement,
calibration, and secondary standards services in the 2 nm to 250 nm
wavelength range.
In performance of this mission, the Electron and Optical Physics Division
operates major research facilities, performs measurement and calibration
services, and pursues basic research.
- Facilities Operation. The Synchrotron Ultraviolet Radiation Facility
(SURF III) supports the optical measurement services and research efforts
of the Division, and those of other NIST organizational units and external
customers. Dramatic improvements in SURF III performance were attained in
2000, including a record operating energy of 387 MeV, and record injection
currents above 500 mA. These compare to SURF II energies and currents
of 284 MeV and 300 mA, respectively. The increase in optical power
output is best illustrated by mention of an accident that occurred in May 2000,
when a beamline window that had seen twenty years’ service on SURF II
cracked under thermal stress induced by the higher power levels. Our higher
level of performance was attained by systematic improvement of the RF and fuzz
power control systems, and by increased logging and automatic control of
operational parameters. These have greatly improved the reproducibility of
operating conditions, so that, for example, injection of 500 mA is now
routine, whereas the 300 mA high current for SURF II could not be
obtained with any predictability. In addition, considerable improvements in
beam stability have been made, sufficient to justify the establishment of a
Fourier-transform spectroscopy beamline.
The Scanning Electron Microscopy with Polarization Analysis (SEMPA) Facility
utilizes spin polarization analysis of secondary electrons to image magnetic
structure of surfaces and thin films. It has been used to analyze device
structure for many major firms in the data storage industry, to develop
standard reference materials for magnetic metrology, and to identify the basic
mechanisms of exchange coupling that underpin the performance of giant
magnetoresistive (GMR) devices. In 2000, a new high-resolution field emission
scanning electron microscope microscope was installed in this facility, to
enable studies of magnetic domain structrure at 10 nm spatial resolution.
- Measurement and Calibration Services. The Division's activities in
calibration and measurement services are centered around SURF III. We
maintain a dedicated spectrometer calibration beamline on BL-2, which mainly supports
NASA
programs in solar physics and EUV astronomy; during 2000 it provided
calibrations of instrumentation destined for the NASA TIMED
satellite mission, and also performed stability studies on new photodiodes that
are candidate components for space-qualified detector packages. A DUV
radiometry facility, operated by the Optical Technology Division, is located on
BL-4. This facility
incorporates an absolute cryogenic radiometer, the NIST primary standard for
detector-based radiometry, which allows for intercomparison the primary
source-based standard, SURF III. During 2000, the BL-4 facility
established an improved DUV spectral responsivity scale, and performed
responsivity and stability measurements on candidate photodiodes for use in
157 nm lithography systems. An EUV optics calibration facility has been in
long service on BL-7, used
primarily to determine reflectivities of multilayer optics, and for related
investigations such as grating efficiencies and film dosimetry. In previous
years, up to 200 calibrations/year have been performed at this facility. An
upgrade of this facility began in Autumn 2000, with the commissioning of a new
large-chamber reflectometer that can accommodate the coming generation of EUV
stepper mirrors. This chamber will also facilitate high-throughput calibration
of smaller EUV optical components. Our UV and EUV detector transfer standards
program uses a dedicated beamline on BL-9 to supply calibrated photodiodes
to external customers within the framework of the NIST Calibration Services
Program. Its activities in 2000 in this regard are summarized in the Appendix.
In addition, BL-9 supports custom measurement work associated with the
development of new photodetectors.
- Basic Research. The Division's basic research programs focus on
issues that bear on the development of nanoscale metrology. In 2000, the
Nanoscale Physics Laboratory began operation of its 2.3 K scanning
tunneling microscope and demonstrated atomic resolution in applied magnetic
fields of up to 10 Tesla, and experiments on the Kondo effect were
initiated. EUV emission from laser-irradiated micron-sized noble-gas droplets
was measured, in support of a program of compact EUV source development. The
complex growth of manganese on an iron substrate was studied and contrasted to
that of chromium to help explain the differing magnetic behavior of the two
systems. The origin of the increased coercivity observed in exchanged biased
bi-layers was modeled and its temperature dependence was predicted. Theoretical
research on coherent matter waves resulted in predictions of soliton and vortex
structures in Bose-Einstein condensates that were verified experimentally, and
assisted in the development of methods for measuring coherence properties of an
"atom laser."